Title
Imaging of the silicon on sapphire interface by high-resolution transmission electron microscopy
Date Issued
01 December 1981
Access level
metadata only access
Resource Type
journal article
Author(s)
Aranovich J.
Abstract
The silicon-sapphire interface of CVD silicon on a (11̄02) sapphire substrate has been studied by high-resolution transmission electron microscopy. Cross-section images of the interface are presented where the silicon and sapphire lattices are directly resolved. The images show that the interface is planar and abrupt to the limit of resolution (less than 3 Å). Defect anisotropy is evident and can be linked to tilt of the [100] direction of the silicon layer with respect to the normal to the substrate.
Start page
439
End page
441
Volume
38
Issue
6
Language
English
OCDE Knowledge area
Física de partículas, Campos de la Física
DOI
Scopus EID
2-s2.0-0342912403
Source
Applied Physics Letters
ISSN of the container
00036951
Sources of information:
Directorio de Producción Científica
Scopus